MEMS Vertical Probe Cards With Ultra Densely Arrayed Metal ...
Abstract?We have developed a MEMS probe-card technology for wafer-level testing ICs with 1-D line-arrayed or 2-D area- arrayed dense pads layouts.
40k Probes on 300mmProbe Card with 40k Probes - Results. ?Used in volume production. ? Stable and consistent Yield results. ?Other designs with similar probe count are currently ... Probe CardAn EEPROM device attached to each probe card lets the tester identify individual cards and count probe touchdowns. It's simple to track each card independently ... Probes Cleaning Effectiveness challenges for fine pitch and high ...MEMS probes are widely used in logic probe cards. ? MEMS advantages: position accuracy, fine pitch, high pin counts, low contact force, easy maintenance, etc.
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