ZAE - SafetyGas

In particular, these alkylamino transition metal complexes, often abbreviated TDMAT and TDMAHf, are used for the growth of both metal nitrides ...







Elaboration d'empilements TiN/HfO2/TiN par Plasma Enhanced ...
Le détecteur de gaz SPM Flex est un système de surveillance de gaz d'extraction qui prélève des échantillons de gaz localement ou depuis un point distant et ...
SPM Flex Détecteur de gaz monopoint Manuel d'utilisation
Near stoichiometric titanium nitride (TiN) was deposited from tetrakis(dimethylamido)titanium (TDMAT) and ammonia using atmospheric pressure.
Atmospheric pressure chemical vapor deposition of TiN from tetrakis ...
Among those organometallic precursors, TDMAT is currently the most used and investi- gated in research laboratories. The co-reactant should be ...



Autres Cours:

The use of substrate biasing during plasma-enhanced atomic layer ...