HIGH PERFORMANCE TRANSPARENT CONDUCTING ... - ORBilu

As the TDMAT precursor mentionned above, the TD-. MASn is liquid at room temperature and highly reactive to air, for this reason it should be.







ECOLE DOCTORALE 352 CINaM/UMR 7325 Thèse présentée pour ...
... TD, TG). Publiée: avec rapport de recherche ... - pulse de tétrakis(diméthylamino) d'étain (TDMASn). ... TDMASn. Le canister délivrant le précurseur de l ...
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ABSTRACT. Indium oxide and doped indium oxide films were successfully grown utilizing a plasma-enhanced atomic layer deposition supercycling.
Hydrogen Plasma-Assisted Spatial Atomic Layer Deposition of SnOx
Growth rates for the 4d- and 5d-metal-based processes vary significantly, the lowest GPC value being 0.1 Å per cycle for the TDMASn + EG and ...



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